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XY piezo stage Product List

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PIHera XY Piezo Stage for Semiconductor Technology

PIHera XY Piezo Stage for Semiconductor Technology

Maximum 1800µm long stroke and nano precision. Position measurement without physical contact using a unique capacitive sensor.

In semiconductor manufacturing, precise and stable positioning of wafers and masks is required. Nanometer-level positioning accuracy affects product quality. Positioning errors can lead to reduced yield and product defects. The P-620.2 to P-629.2 PIHera® series is an XY-axis piezo nano-positioning stage that employs long-life PICMA® actuators. With closed-loop control using capacitive sensors, it achieves excellent linearity and stability, providing high resolution below 1nm and bidirectional reproducibility of ±0.2nm. 【Application Scenarios】 - Semiconductor manufacturing equipment - Wafer inspection - Mask alignment - Probing 【Benefits of Implementation】 - Improved yield through high-precision positioning - Increased productivity due to stable operation - Ease of integration into equipment due to compact housing - Enhanced maintainability with long-life actuators

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PIHera XY Piezo Stage for Microscopes

PIHera XY Piezo Stage for Microscopes

Ideal for microscope sample positioning with a maximum stroke of 1800µm and excellent accuracy provided by capacitive sensors.

In the field of microscopy, it is essential to scan the observation target with high precision to obtain clear images. Particularly in the observation of fine structures and biological samples such as cells, the accuracy of positioning significantly influences the observation results. Low positioning accuracy can lead to a lack of focus, making accurate observation difficult. A compact XY-axis piezo stage achieves high-precision scanning with a resolution of less than 1nm and bidirectional reproducibility of ±0.2nm. 【Application Scenarios】 - Scanning samples in microscopic observation - Fine adjustments during high magnification observation - Cell imaging 【Benefits of Implementation】 - Clear image acquisition through high-precision positioning - Reduction of observation time - Improvement of experimental reproducibility

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PIHera XY Piezo Stage for Biotechnology

PIHera XY Piezo Stage for Biotechnology

Ideal for cell manipulation and live cell observation. Achieves stable XY positioning with sub-nanometer precision.

In the field of biotechnology, particularly in cell manipulation and live cell observation, even slight positional shifts of samples can significantly impact the results. To achieve smooth and high-precision positioning while minimizing damage to cells, sub-nanometer resolution and high reproducibility are essential. This product offers high resolution below 1nm and bidirectional reproducibility of ±0.2nm, ensuring high reliability and efficiency in cell manipulation. 【Application Scenarios】 - Biosensor evaluation - Integration into microfluidic devices 【Benefits of Implementation】 - Improved reproducibility of experiments - Enhanced research efficiency - For detailed product specifications, please refer to the catalog.

  • Other machine elements
  • Piezoelectric Devices
  • Cartesian Robot
  • XY piezo stage

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